Focus on Atomic Level Process System
Atomic Precision (At.Precis) is composed of a dedicated team of vacuum plasma process equipment engineers, with key members encompassing research and development, design, project management, process engineering, assembly, and customer service, each boasting an average of over 10 years of industry expertise. Employing groundbreaking research and fortified by practical experience and analytical feedback, we have overcome the issues plaguing traditional equipment suppliers, such as incomplete replication, lack of theoretical foundation, and unsupported technical assistance, which have resulted in unreliable equipment. In response to the global industry's thirst for innovative technological solutions, we possess the capability to deliver.
Products
PEALD Systems
PEALD Modules and Transport Platforms
C-Atomic
showerhead-type CCP plasma
PEALD module
E-Atomic
showerhead-type CCP plasma
PEALD module
Single Foup SMIF
Modules and Services
Hollow-cathode discharge
Remote plasma module
Customized process system
design and manufacture
Atomic Precision Library- APL
Technical supporting