Product Categories
We offer a complete ALD/PEALD product line. In terms of wafer size, our product range spans from 2-inch wafers up to 12-inch wafers, and we even possess the technology to manufacture uniform coatings on 18-inch wafers. In terms of process requirements, the core technologies of our products can be primarily divided into two categories. One category is focused on equipment designed to produce high-quality films, while the other category is geared towards achieving high uniformity and high throughput.